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The metalens and metasurface design workflow

A metalens controls light with millions to billions of nanostructures, which means solving two problems of very different scale at once: rigorous analysis of the unit structure, and the design and layout of the whole lens. This page sets out the route from unit structure analysis to manufacturing data handover as one continuous sequence.

Design challenges

Two problems of different scale, solved by going back and forth

The response of the unit structure (the meta-atom) needs rigorous electromagnetic analysis at wavelength scale, while the whole lens has to be judged on its performance as an optical system. Managing the design data that moves between the two is where the practical bottleneck lies.

Challenge | difference in scaleThe unit structure is at wavelength scale, the whole lens at millimeter to centimeter scale. No single method handles both at once.
Challenge | data going back and forthAnalysis results, the phase library, geometry data and the optical system model each live in a different environment, and every round trip needs a conversion of format and conditions.
Challenge | manufacturabilityA design can hold up on paper and still send you back to the layout if it does not fall within manufacturable dimensions. The constraints bite at the assignment stage, not at the end of the design.

Engineering requirements

What has to hold for the design to work

Whichever stage you start from, unless these five are in place at the end, the design does not hold up as an optical system.

Accuracy of the unit structure responsePhase and transmittance at the target wavelength, material and pitch can be evaluated, diffraction orders included.
Phase coverage and continuityThe required phase range is covered at sufficient resolution, and the response does not jump between neighboring structures.
Reproducing the full lens apertureThe target phase profile can be assigned across the whole lens, and laid out without breaking down as the element count grows.
Performance as an optical systemImaging performance can be confirmed with the lens built into a real optical system, not just as a standalone efficiency figure.
Consistency of the manufacturing dataThe layout and dimensional conditions you output match the constraints of the intended fabrication method.

Design and simulation workflow

From unit structure analysis to manufacturing data

01

Define the unit cell design conditions

Working from the target wavelength, settle the material, geometry, pitch and height. The range and step of the parameters to sweep are also defined at this stage.

Output / design conditions and sweep parameters

02

Electromagnetic analysis by RCWA or FDTD

Under periodic boundaries, obtain the complex transmission coefficient for each set of dimensions. RCWA suits sweeps of periodic structures; FDTD suits non-periodic structures and verification of proximity effects.

Output / complex transmission coefficient per set of dimensions

03

Building the phase and transmittance library

Collect the sweep results into a table mapping dimensions to phase and transmittance. This is where you establish the phase coverage and the regions where transmittance falls away.

Output / phase and transmittance library

04

Mapping phase to geometry

Define the target phase profile and, through the library, assign structural dimensions at each position. Dimensions outside the fabrication constraints are removed from the candidates at this stage.

Output / a map of structural dimensions by position

05

Large-scale layout generation

Generate the structure placement across the whole lens. Because the element count reaches millions to billions, generation and verification are built as an automated stage.

Output / layout data (GDS)

06

Verification in the optical system

Exchange the phase surface data with the optical design environment and evaluate imaging performance and aberrations with the lens built into the system. If it falls outside specification, return to the definition of the target phase.

Output / optical system model and imaging performance

07

Handing over the manufacturing data

Pass the layout and dimensional conditions to the manufacturing stage. Which constraints apply depends on the fabrication method, so the conditions are confirmed case by case.

Output / manufacturing layout and dimensional conditions

The stages differ by project. If you already have a phase design or a library, you can start partway through.

Related products

Products used at each step

The capabilities and coverage of each product are described on its own product page.

Lumerical FDTD

Handles electromagnetic analysis of the unit structure. With RCWA and FDTD solvers, it covers dimensional sweeps, obtaining complex transmission coefficients, and generating the phase and transmittance library.

Stage / 02-03

Photonica Metalens Engine

Handles the design workflow from library to layout. It takes in the phase and transmittance library and covers phase-to-geometry mapping, large-scale layout generation and GDS output.

Stage / 03-05

Zemax OpticStudio

Handles verification as an optical system. Phase surface data is exchanged, and imaging performance and aberrations are evaluated with the lens built into a real optical system.

Stage / 06

Foundry and manufacturing

Connecting design data to manufacturing

The output of the design stage is the layout data for the whole lens aperture and the dimensional conditions that make it work. Moving to manufacturing means confirming that both match the constraints of the fabrication method. Which of linewidth, aspect ratio, sidewall angle and in-plane uniformity dominates depends on the target wavelength, the material, and the fabrication method chosen.

Which fabrication method applies, and whether it can be carried out, is judged case by case from the target wavelength, material and structural dimensions. There is no standardized process here, so please start by talking to us about the conditions for handing over the design data.

Talk to us about your target wavelength, material and pitch

Tell us where the design stands, whether a phase design exists, your target specification, and any manufacturing planned, and we will propose a way forward.